Influence of Temperature Field Distribution on the Growth of Aluminum Nitride Crystal by Simulation Technology

During the crystal growth process, the temperature distribution in the reactor plays a decisive role in crystal growth and directly affects the crystal growth rate. In this study, a numerical simulation method was used to model and study the temperature distribution in the PVT AlN crystal reactor. B...

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Bibliographic Details
Main Authors: Shengtao Zhang, Wenbo Yuan, Guofeng Fan, Tie Li, Lili Zhao
Format: Article
Language:English
Published: MDPI AG 2022-09-01
Series:Crystals
Subjects:
Online Access:https://www.mdpi.com/2073-4352/12/9/1320