High-Performance MEMS Oxygen Sensors Based on Au/TiO<sub>2</sub> Films
High-performance microelectromechanical system (MEMS) oxygen sensors were realized by successful preparation of Au nanofilms over TiO<sub>2</sub> thin films through successive sputtering on commercial MEMS microhotplates. Oxygen sensing performance of 3 and 6 nm thick Au over TiO<sub&...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-08-01
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| Series: | Chemosensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2227-9040/11/9/476 |