Virtual Metrology in Semiconductor Fabrication Foundry Using Deep Learning Neural Networks
Physical metrology inspections are crucial in semiconductor fabrication to ensure that wafers are fabricated within the production specification limits and to prevent faulty wafers from being shipped and installed in customer devices. However, it is not possible to examine every wafer, as such inspe...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2022-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9839454/ |