Bifurcation Analysis on the Periodic Response of a Comb Drive MEMS Resonator
In this paper, we investigate the bifurcation characteristics of a comb drive MEMS resonator. The method of averaging and the residue theorem are used to get a more accurate analytical solution for the periodic response. Then, the singularity theory is employed to give the transition sets on the DC-...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2022-01-01
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Series: | Micromachines |
Subjects: | |
Online Access: | https://www.mdpi.com/2072-666X/13/2/148 |