Plasma Assisted Chemical Vapour Deposition – Technological Design Of Functional Coatings
Plasma Assisted Chemical Vapour Deposition (PA CVD) method allows to deposit of homogeneous, well-adhesive coatings at lower temperature on different substrates. Plasmochemical treatment significantly impacts on physicochemical parameters of modified surfaces. In this study we present the overview o...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
Polish Academy of Sciences
2015-06-01
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Series: | Archives of Metallurgy and Materials |
Subjects: | |
Online Access: | http://www.degruyter.com/view/j/amm.2015.60.issue-2/amm-2015-0228/amm-2015-0228.xml?format=INT |