Self-traceable angle standards with simplified traceability chain for dimensional metrology

Self-traceable angle standards with simplified traceability chain for dimensional metrology

Traceability is a fundamental issue for ensuring accuracy of nanometrology. A shortened traceability chain is advantageous for reducing calibration steps, thus reducing errors and raising application efficiency. A novel kind of two-dimensional grating is manufactured by atom lithography, whose pitch...

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Bibliographic Details
Main Authors: Xiao Deng, Junyu Shen, Yingfan Xiong, Jinming Gou, Zhaohui Tang, Guangxu Xiao, Zhijun Yin, Dongbai Xue, Yushu Shi, Zhoumiao Shi, Yuying Xie, Xinbin Cheng, Tongbao Li
Format: Article
Language:English
Published: IOP Publishing 2024-01-01
Series:Applied Physics Express
Subjects:
dimensional metrology
shortened angle traceability chain
atom lithography
2D self-traceable grating
SEM calibration
Online Access:https://doi.org/10.35848/1882-0786/ad87a9

Internet

https://doi.org/10.35848/1882-0786/ad87a9

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