Actuating Bimorph Microstructures with Magnetron-Sputtered Ti-Ni-Cu Shape Memory Alloy Films
The generation of microactuation using narrow thermal hysteresis Ti-Ni-Cu shape-memory alloy films deposited on non-metallic substrates as the active element is studied based on a model previously developed for Ni-Ti/Si bimorphs. To this end, the compositional range in which the B2 (monoclinic) → B1...
Main Authors: | , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
MDPI AG
2022-11-01
|
Series: | Nanomaterials |
Subjects: | |
Online Access: | https://www.mdpi.com/2079-4991/12/23/4207 |