Thermodynamic Theory of Phase Separation in Nonstoichiometric Si Oxide Films Induced by High-Temperature Anneals

Thermodynamic Theory of Phase Separation in Nonstoichiometric Si Oxide Films Induced by High-Temperature Anneals

High-temperature anneals of nonstoichiometric Si oxide (SiO<sub>x</sub>, <i>x</i> < 2) films induce phase separation in them, with the formation of composite structures containing amorphous or crystalline Si nanoinclusions embedded in the Si oxide matrix. In this paper, a...

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Bibliographic Details
Main Author: Andrey Sarikov
Format: Article
Language:English
Published: MDPI AG 2023-07-01
Series:Nanomanufacturing
Subjects:
thermodynamic theory
phase separation
nonstoichiometric Si oxide
Gibbs free energy
Si nanoparticles
penalty energy
Online Access:https://www.mdpi.com/2673-687X/3/3/19

Internet

https://www.mdpi.com/2673-687X/3/3/19

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