A Sensitivity-Enhanced Film Bulk Acoustic Resonator Gas Sensor with an Oscillator Circuit and Its Detection Application
This paper presents a sensitivity-enhanced gas sensor based on a film bulk acoustic resonator (FBAR). It was designed and fabricated with micro through-holes in its top electrode for sensitivity enhancement. The sensor was driven by a Colpitts oscillator circuit, and the output signal had characteri...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2017-01-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | http://www.mdpi.com/2072-666X/8/1/25 |