Design of Zeolitic Imidazolate Framework-8-Functionalized Capacitive Micromachined Ultrasound Transducer Gravimetric Sensors for Gas and Hydrocarbon Vapor Detection

Design of Zeolitic Imidazolate Framework-8-Functionalized Capacitive Micromachined Ultrasound Transducer Gravimetric Sensors for Gas and Hydrocarbon Vapor Detection

A capacitive micromachined ultrasound transducer (CMUT) was engineered and functionalized with zeolitic imidazolate framework-8 (ZIF-8) dispersed in a photoresist AZ1512HS (AZ) matrix to function as a gravimetric gas sensor. The sensor response was recorded in the presence of nitrogen, argon, carbon...

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Bibliographic Details
Main Authors: Mindaugas Dzikaras, Dovydas Barauskas, Donatas Pelenis, Gailius Vanagas, Marius Mikolajūnas, Jingming Shi, Jonas Baltrusaitis, Darius Viržonis
Format: Article
Language:English
Published: MDPI AG 2023-10-01
Series:Sensors
Subjects:
gravimetric
gas sensor
ZIF-8
CMUT
hydrocarbons
Online Access:https://www.mdpi.com/1424-8220/23/21/8827

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https://www.mdpi.com/1424-8220/23/21/8827

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