EPITAXIAL LATERAL OVERGROWTH TECHNIQUE – BASICS OF THE GROWTH TECHNOLOGY AND PROPERTIES OF THE LAYERS
This article provides a general review of the epitaxial lateral overgrowth (ELO) technology and of application of ELO layers as substrates with adjustable value of lattice constant. In particular, the issues of ELO growth mechanism, substrate defect filtration during ELO procedure and strain in ELO...
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| Format: | Article |
| Language: | Arabic |
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Tishreen University
2018-12-01
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| Series: | مجلة جامعة تشرين للبحوث والدراسات العلمية، سلسلة العلوم الأساسية |
| Online Access: | http://www.journal.tishreen.edu.sy/index.php/bassnc/article/view/4979 |