Growth and Characterization of Sputtered InAlN Nanorods on Sapphire Substrates for Acetone Gas Sensing

The demand for highly sensitive and selective gas sensors has been steadily increasing, driven by applications in various fields such as environmental monitoring, healthcare, and industrial safety. In this context, ternary alloy indium aluminum nitride (InAlN) semiconductors have emerged as a promis...

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Bibliographic Details
Main Authors: Ray-Hua Horng, Po-Hsiang Cho, Jui-Che Chang, Anoop Kumar Singh, Sheng-Yuan Jhang, Po-Liang Liu, Dong-Sing Wuu, Samiran Bairagi, Cheng-Hsu Chen, Kenneth Järrendahl, Ching-Lien Hsiao
Format: Article
Language:English
Published: MDPI AG 2023-12-01
Series:Nanomaterials
Subjects:
Online Access:https://www.mdpi.com/2079-4991/14/1/26