Depth profile analysis of nanometric multilayer coatings by radio-frequency glow discharge optical emission spectroscopy

Depth profile analysis of nanometric multilayer coatings by radio-frequency glow discharge optical emission spectroscopy

Radiofrequency glow discharge optical emission spectrometry(RF-GD-OES) was used to quantitatively analyze the depth of nanometric Cr/Ni multilayers on a silicon substrate. The technique permitted the rapid and accurate depth profiling of multilayers, down to the nanometer range. The analytical param...

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Bibliographic Details
Main Authors: Jang-Hee Yoon, Jong-Pil Kim, Kyung Joong Kim, Jong-Seong Bae, Byoung Seob Lee, Mi-Sook Won
Format: Article
Language:English
Published: SpringerOpen 2010-11-01
Series:Journal of Analytical Science and Technology
Subjects:
RF-GD-OES
Depth profiling
Multilayer
Nanothickness
Online Access:http://www.jastmag.org/journal/view.php?doi=10.5355/JAST.2011.36

Internet

http://www.jastmag.org/journal/view.php?doi=10.5355/JAST.2011.36

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