Anomalous epitaxial stability of (001) interfaces in ZrN/SiNx multilayers
Isostructural stability of B1-NaCl type SiN on (001) and (111) oriented ZrN surfaces is studied theoretically and experimentally. The ZrN/SiNx/ZrN superlattices with modulation wavelength of 3.76 nm (dSiNx∼0.4 nm) were grown by dc-magnetron sputtering on MgO(001) and MgO(111). The results indicate t...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2014-04-01
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| Series: | APL Materials |
| Online Access: | http://dx.doi.org/10.1063/1.4870876 |