Regime Map of the Effective Medium Approximation Modelling of Micro-Rough Surfaces in Ellipsometry

Regime Map of the Effective Medium Approximation Modelling of Micro-Rough Surfaces in Ellipsometry

In this work, we discuss the precision of the effective medium approximation (EMA) model in the data analysis of spectroscopic ellipsometry (SE) for solid materials with micro-rough surfaces by drawing the regime map. The SE parameters ψ (amplitude ratio) and Δ (phase difference) of the EMA model we...

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Bibliographic Details
Main Authors: Meijiao Huang, Liang Guo, Fengyi Jiang
Format: Article
Language:English
Published: MDPI AG 2024-02-01
Series:Sensors
Subjects:
ellipsometry
rough surfaces
effective medium approximation
regime map
Online Access:https://www.mdpi.com/1424-8220/24/4/1242

Internet

https://www.mdpi.com/1424-8220/24/4/1242

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