A Thermopile Detector Based on Micro-Bridges for Heat Transfer

A Thermopile Detector Based on Micro-Bridges for Heat Transfer

A thermopile detector with their thermocouples distributed in micro-bridges is designed and investigated in this work. The thermopile detector consists of 16 pairs of n-poly-Si/p-poly-Si thermocouples, which are fabricated using a low-cost, high-throughput CMOS process. The micro-bridges are realize...

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Bibliographic Details
Main Authors: Na Zhou, Xuefeng Ding, Hongbo Li, Yue Ni, Yonglong Pu, Haiyang Mao
Format: Article
Language:English
Published: MDPI AG 2021-12-01
Series:Micromachines
Subjects:
thermopile detectors
micro-bridge
poly-Si thermocouples
thermal conduction
CMOS process
Online Access:https://www.mdpi.com/2072-666X/12/12/1554

Internet

https://www.mdpi.com/2072-666X/12/12/1554

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