A Thermopile Detector Based on Micro-Bridges for Heat Transfer
A thermopile detector with their thermocouples distributed in micro-bridges is designed and investigated in this work. The thermopile detector consists of 16 pairs of n-poly-Si/p-poly-Si thermocouples, which are fabricated using a low-cost, high-throughput CMOS process. The micro-bridges are realize...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2021-12-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/12/12/1554 |
| _version_ | 1797502377554608128 |
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| author | Na Zhou Xuefeng Ding Hongbo Li Yue Ni Yonglong Pu Haiyang Mao |
| author_facet | Na Zhou Xuefeng Ding Hongbo Li Yue Ni Yonglong Pu Haiyang Mao |
| author_sort | Na Zhou |
| collection | DOAJ |
| description | A thermopile detector with their thermocouples distributed in micro-bridges is designed and investigated in this work. The thermopile detector consists of 16 pairs of n-poly-Si/p-poly-Si thermocouples, which are fabricated using a low-cost, high-throughput CMOS process. The micro-bridges are realized by forming micro trenches at the front side first and then releasing the silicon substrate at the back side. Compared with a thermopile device using a continuous membrane, the micro-bridge-based one can achieve an improvement of the output voltage by 13.8% due to a higher temperature difference between the hot and cold junctions as there is a decrease in thermal conduction loss in the partially hollowed structure. This technique provides an effective way for developing high-performance thermopile detectors and other thermal devices. |
| first_indexed | 2024-03-10T03:33:09Z |
| format | Article |
| id | doaj.art-4d5a13acccdd42bba7315601d1e8f6eb |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T03:33:09Z |
| publishDate | 2021-12-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-4d5a13acccdd42bba7315601d1e8f6eb2023-11-23T09:36:58ZengMDPI AGMicromachines2072-666X2021-12-011212155410.3390/mi12121554A Thermopile Detector Based on Micro-Bridges for Heat TransferNa Zhou0Xuefeng Ding1Hongbo Li2Yue Ni3Yonglong Pu4Haiyang Mao5Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, ChinaJiangsu Hinovaic Technologies Co., Ltd., Wuxi 214135, ChinaInstitute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, ChinaJiangsu Hinovaic Technologies Co., Ltd., Wuxi 214135, ChinaInstitute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, ChinaInstitute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, ChinaA thermopile detector with their thermocouples distributed in micro-bridges is designed and investigated in this work. The thermopile detector consists of 16 pairs of n-poly-Si/p-poly-Si thermocouples, which are fabricated using a low-cost, high-throughput CMOS process. The micro-bridges are realized by forming micro trenches at the front side first and then releasing the silicon substrate at the back side. Compared with a thermopile device using a continuous membrane, the micro-bridge-based one can achieve an improvement of the output voltage by 13.8% due to a higher temperature difference between the hot and cold junctions as there is a decrease in thermal conduction loss in the partially hollowed structure. This technique provides an effective way for developing high-performance thermopile detectors and other thermal devices.https://www.mdpi.com/2072-666X/12/12/1554thermopile detectorsmicro-bridgepoly-Si thermocouplesthermal conductionCMOS process |
| spellingShingle | Na Zhou Xuefeng Ding Hongbo Li Yue Ni Yonglong Pu Haiyang Mao A Thermopile Detector Based on Micro-Bridges for Heat Transfer Micromachines thermopile detectors micro-bridge poly-Si thermocouples thermal conduction CMOS process |
| title | A Thermopile Detector Based on Micro-Bridges for Heat Transfer |
| title_full | A Thermopile Detector Based on Micro-Bridges for Heat Transfer |
| title_fullStr | A Thermopile Detector Based on Micro-Bridges for Heat Transfer |
| title_full_unstemmed | A Thermopile Detector Based on Micro-Bridges for Heat Transfer |
| title_short | A Thermopile Detector Based on Micro-Bridges for Heat Transfer |
| title_sort | thermopile detector based on micro bridges for heat transfer |
| topic | thermopile detectors micro-bridge poly-Si thermocouples thermal conduction CMOS process |
| url | https://www.mdpi.com/2072-666X/12/12/1554 |
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