Phase formation, thermal stability and magnetic moment of cobalt nitride thin films
Cobalt nitride (Co-N) thin films prepared using a reactive magnetron sputtering process are studied in this work. During the thin film deposition process, the relative nitrogen gas flow (RN2) was varied. As RN2 increases, Co(N), Co4N, Co3N and CoN phases are formed. An incremental increase in RN2, a...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2015-09-01
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Series: | AIP Advances |
Online Access: | http://dx.doi.org/10.1063/1.4930977 |