Low-temperature ALD process development of 200 mm wafer-scale MoS2 for gas sensing application

Low-temperature ALD process development of 200 mm wafer-scale MoS2 for gas sensing application

The unique electronic and mechanical properties of transition metal dichalcogenides (TMDs) make them interesting for industry and research as the demand for two-dimensional (2D) material applications has been increased in the last decade. Most applications make use of the characteristic optical prop...

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Bibliographic Details
Main Authors: R.-M. Neubieser, J.-L. Wree, J. Jagosz, M. Becher, A. Ostendorf, A. Devi, C. Bock, M. Michel, A. Grabmaier
Format: Article
Language:English
Published: Elsevier 2022-06-01
Series:Micro and Nano Engineering
Subjects:
2D
MoS2
Wafer-scale
Gas sensing
ALD
TMD
Online Access:http://www.sciencedirect.com/science/article/pii/S2590007222000235

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http://www.sciencedirect.com/science/article/pii/S2590007222000235

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