Design and Simulation of a 19-Electrode MEMS Piezoelectric Thin-Film Micro-Deformable Mirror for Ophthalmology

Design and Simulation of a 19-Electrode MEMS Piezoelectric Thin-Film Micro-Deformable Mirror for Ophthalmology

This study presents a numerical simulation-based investigation of a MEMS (micro-electromechanical systems)technology-based deformable mirror employing a piezoelectric film for fundus examination in adaptive optics. Compared to the classical equal-area electrode arrangement model, we optimize the ele...

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Bibliographic Details
Main Authors: Yisen Hu, Hongbo Yin, Maoying Li, Tianyu Bai, Liang He, Zhimin Hu, Yuanlin Xia, Zhuqing Wang
Format: Article
Language:English
Published: MDPI AG 2024-04-01
Series:Micromachines
Subjects:
adaptive optics
deformable mirror
piezoelectric film
aberration correction
Online Access:https://www.mdpi.com/2072-666X/15/4/539

Internet

https://www.mdpi.com/2072-666X/15/4/539

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