Investigation of uniformity SiO2 thin film deposited by electron beam and thermal evaporation method
In this paper, SiO2 thin film is produced by two methods: at the first method, SiO2 is evaporated by the electron gun and oxygen gas is injected to compensate for oxygen loss due to dissociation. At the second method, silicon monoxide is evaporated by thermal evaporation and during the evaporation t...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Isfahan University of Technology
2017-11-01
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| Series: | Iranian Journal of Physics Research |
| Subjects: | |
| Online Access: | http://ijpr.iut.ac.ir/browse.php?a_code=A-10-1879-3&slc_lang=en&sid=1 |