Deep Reactive Ion Etching of Z-Cut Alpha Quartz for MEMS Resonant Devices Fabrication

Deep Reactive Ion Etching of Z-Cut Alpha Quartz for MEMS Resonant Devices Fabrication

Quartz is widely used in microelectromechanical systems (MEMS). Especially, MEMS quartz resonators are applied to sensors and serve as sensitive elements. The capability of deep etching is a limitation for the application. Presented in this paper is a deep and high accuracy reactive ion etching meth...

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Bibliographic Details
Main Authors: Bo Li, Cun Li, Yulong Zhao, Chao Han, Quanwei Zhang
Format: Article
Language:English
Published: MDPI AG 2020-07-01
Series:Micromachines
Subjects:
quartz deep etching
machining accuracy
Cr mask
vertical sidewall
smooth surface
Online Access:https://www.mdpi.com/2072-666X/11/8/724

Internet

https://www.mdpi.com/2072-666X/11/8/724

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