Crystal plasticity analysis of the suppression of dislocation accumulation during the production process of semiconductor devices
High-density memories and high-speed CPUs are usually realized by reduction of the size of semiconductor cells in Large Scale Integrations (LSIs). Representative length scale of Ultra Large Scale Integration (ULSI) cells is going to be in nano-meter order. Dislocation accumulation during the product...
| Main Authors: | , , |
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| Format: | Article |
| Language: | Japanese |
| Published: |
The Japan Society of Mechanical Engineers
2020-04-01
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| Series: | Nihon Kikai Gakkai ronbunshu |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/transjsme/86/884/86_19-00457/_pdf/-char/en |