Multiscale Dense U-Net: A Fast Correction Method for Thermal Drift Artifacts in Laboratory NanoCT Scans of Semi-Conductor Chips
The resolution of 3D structure reconstructed by laboratory nanoCT is often affected by changes in ambient temperature. Although correction methods based on projection alignment have been widely used, they are time-consuming and complex. Especially in piecewise samples (e.g., chips), the existing met...
| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-07-01
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| Series: | Entropy |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1099-4300/24/7/967 |