Decoupling and Synchronization Control of Asymmetric Flexure-Linked Dual-Drive Gantry Stage
A decoupling and synchronization control strategy based on a model-compensated extended state observer is proposed in control of a dual-drive gantry positioning stage with asymmetric flexure-linked structures. A gantry dynamic model considering the features of the flexure-linked structures and the i...
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| Format: | Article |
| Language: | zho |
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Editorial Office of Journal of Shanghai Jiao Tong University
2023-05-01
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| Series: | Shanghai Jiaotong Daxue xuebao |
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| Online Access: | https://xuebao.sjtu.edu.cn/article/2023/1006-2467/1006-2467-57-5-593.shtml |