Effects of Thermal Annealing on Femtosecond Laser Micromachined Glass Surfaces

Effects of Thermal Annealing on Femtosecond Laser Micromachined Glass Surfaces

Femtosecond laser micromachining (FLM) of fused silica allows for the realization of three-dimensional embedded optical elements and microchannels with micrometric feature size. The performances of these components are strongly affected by the machined surface quality and residual roughness. The pol...

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Bibliographic Details
Main Authors: Federico Sala, Petra Paié, Rebeca Martínez Vázquez, Roberto Osellame, Francesca Bragheri
Format: Article
Language:English
Published: MDPI AG 2021-02-01
Series:Micromachines
Subjects:
femtosecond laser micromachining
fused silica
roughness analysis
thermal annealing
integrated optics
Online Access:https://www.mdpi.com/2072-666X/12/2/180

Internet

https://www.mdpi.com/2072-666X/12/2/180

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