Thermal conductivity enhancement of aluminum scandium nitride grown by molecular beam epitaxy

Thermal conductivity enhancement of aluminum scandium nitride grown by molecular beam epitaxy

Aluminum scandium nitride (AlScN) has been receiving increasing interest for radio frequency microelectromechanical systems because of their higher achievable bandwidths owing to the larger piezoelectric response of AlScN compared to AlN. However, alloying scandium (Sc) with aluminum nitride (AlN) s...

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Bibliographic Details
Main Authors: Gustavo A. Alvarez, Joseph Casamento, Len van Deurzen, Md Irfan Khan, Kamruzzaman Khan, Eugene Jeong, Elaheh Ahmadi, Huili Grace Xing, Debdeep Jena, Zhiting Tian
Format: Article
Language:English
Published: Taylor & Francis Group 2023-12-01
Series:Materials Research Letters
Subjects:
Cross-plane thermal conductivity
frequency domain thermoreflectance
molecular beam epitaxy
lattice mismatch
Online Access:https://www.tandfonline.com/doi/10.1080/21663831.2023.2279667

Internet

https://www.tandfonline.com/doi/10.1080/21663831.2023.2279667

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