Micro-Electro-Mechanical Systems Microphones: A Brief Review Emphasizing Recent Advances in Audible Spectrum Applications

The MEMS microphone is a representative device among the MEMS family, which has attracted substantial research interest, and those tailored for human voice have earned distinct success in commercialization. Although sustained development persists, challenges such as residual stress, environmental no...

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Bibliographic Details
Main Authors: Zhuoyue Zheng, Chen Wang, Linlin Wang, Zeyu Ji, Xiaoxiao Song, Pui-In Mak, Huafeng Liu, Yuan Wang
Format: Article
Language:English
Published: MDPI AG 2024-02-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/15/3/352