Fabrication of Slanted Cu Nanopillars with Uniform Arrays
Slanted Cu nanopillars with uniform arrays were fabricat‐ ed using slanted Si channel structures as templates. A slanted plasma etching technique was employed, utilizing a Faraday cage system for the formation of these slanted channel structures. The angle of the slanted channel structures was accur...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Hindawi - SAGE Publishing
2016-02-01
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| Series: | Nanomaterials and Nanotechnology |
| Subjects: | |
| Online Access: | http://www.intechopen.com/journals/nanomaterials_and_nanotechnology/fabrication-of-slanted-cu-nanopillars-with-uniform-arrays |