TALPINIŲ MIKROMONTUOJAMŲ ULTRAGARSINIŲ KEITIKLIŲ TAIKYMAS = APPLICATION OF CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS
The main structure of the CMUT element is its capacitive cell that has one moveable and one fixed electrode. Between these electrodes (the movable one is usually structurally aligned with the membrane) there is a vacuum gap, which creates a cavity for the displacement of the membrane. When the elect...
Main Authors: | , |
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Format: | Article |
Language: | English |
Published: |
Panevėžio kolegija
2019-12-01
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Series: | Taikomieji tyrimai studijose ir praktikoje |
Subjects: | |
Online Access: | https://ojs.panko.lt/index.php/ARSP/article/view/88/74 |