Vibrating Flexoelectric Micro-Beams as Angular Rate Sensors
We studied flexoelectrically excited/detected bending vibrations in perpendicular directions of a micro-beam spinning about its axis. A set of one-dimensional equations was derived and used in a theoretical analysis. It is shown that the Coriolis effect associated with the spin produces an electrica...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-08-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/13/8/1243 |