Accuracy Improvement of a Miniature Laser Diode Interferometer by Compensating Nonlinear Errors and Active Stabilizing Laser Diode Wavelengths

A miniature laser diode interferometer (MLDI), which can be embedded in precision machines or measurement equipment as an on-line measurement sensor, is designed. A compact laser diode (LD) is adopted as the laser source of the MLDI. The measurement accuracy of the MLDI is affected by the nonlinear...

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Bibliographic Details
Main Authors: Yindi Cai, Yang Liu, Chang Li, Zhixiang Wen
Format: Article
Language:English
Published: MDPI AG 2022-06-01
Series:Applied Sciences
Subjects:
Online Access:https://www.mdpi.com/2076-3417/12/12/6064