Accuracy Improvement of a Miniature Laser Diode Interferometer by Compensating Nonlinear Errors and Active Stabilizing Laser Diode Wavelengths
A miniature laser diode interferometer (MLDI), which can be embedded in precision machines or measurement equipment as an on-line measurement sensor, is designed. A compact laser diode (LD) is adopted as the laser source of the MLDI. The measurement accuracy of the MLDI is affected by the nonlinear...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-06-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/12/12/6064 |