GaN-Based Resonant-Cavity Light-Emitting Diodes Grown on Si

GaN-on-Si resonant-cavity light-emitting diodes (RCLEDs) have been successfully fabricated through wafer bonding and Si substrate removal. By combining the chemical mechanical polishing technique, we obtained a roughness of about 0.24 nm for a scan area of 5 μm × 5 μm. The double-sided dielectric di...

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Main Authors: Wen Chen, Meixin Feng, Yongjun Tang, Jian Wang, Jianxun Liu, Qian Sun, Xumin Gao, Yongjin Wang, Hui Yang
Format: Article
Language:English
Published: MDPI AG 2021-12-01
Series:Nanomaterials
Subjects:
Online Access:https://www.mdpi.com/2079-4991/12/1/134
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author Wen Chen
Meixin Feng
Yongjun Tang
Jian Wang
Jianxun Liu
Qian Sun
Xumin Gao
Yongjin Wang
Hui Yang
author_facet Wen Chen
Meixin Feng
Yongjun Tang
Jian Wang
Jianxun Liu
Qian Sun
Xumin Gao
Yongjin Wang
Hui Yang
author_sort Wen Chen
collection DOAJ
description GaN-on-Si resonant-cavity light-emitting diodes (RCLEDs) have been successfully fabricated through wafer bonding and Si substrate removal. By combining the chemical mechanical polishing technique, we obtained a roughness of about 0.24 nm for a scan area of 5 μm × 5 μm. The double-sided dielectric distributed Bragg reflectors could form a high-quality optical resonant cavity, and the cavity modes exhibited a linewidth of 1 nm at the peak wavelength of around 405 nm, corresponding to a quality factor of 405. High data transmission in free space with an opening in the eye diagram was exhibited at 150 Mbps, which is limited by the detection system. These results showed that GaN-based RCLEDs grown on Si are promising as a low-cost emitter for visible light communications in future.
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spelling doaj.art-509dc1005f074b44817af7b1cc7f429d2023-11-23T12:01:59ZengMDPI AGNanomaterials2079-49912021-12-0112113410.3390/nano12010134GaN-Based Resonant-Cavity Light-Emitting Diodes Grown on SiWen Chen0Meixin Feng1Yongjun Tang2Jian Wang3Jianxun Liu4Qian Sun5Xumin Gao6Yongjin Wang7Hui Yang8Jiangxi Institute of Nanotechnology, Nanchang 330200, ChinaJiangxi Institute of Nanotechnology, Nanchang 330200, ChinaKey Laboratory of Nanodevices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS), Suzhou 215123, ChinaKey Laboratory of Nanodevices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS), Suzhou 215123, ChinaJiangxi Institute of Nanotechnology, Nanchang 330200, ChinaJiangxi Institute of Nanotechnology, Nanchang 330200, ChinaGrünberg Research Centre, Nanjing University of Posts and Telecommunications, Nanjing 210003, ChinaGrünberg Research Centre, Nanjing University of Posts and Telecommunications, Nanjing 210003, ChinaKey Laboratory of Nanodevices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS), Suzhou 215123, ChinaGaN-on-Si resonant-cavity light-emitting diodes (RCLEDs) have been successfully fabricated through wafer bonding and Si substrate removal. By combining the chemical mechanical polishing technique, we obtained a roughness of about 0.24 nm for a scan area of 5 μm × 5 μm. The double-sided dielectric distributed Bragg reflectors could form a high-quality optical resonant cavity, and the cavity modes exhibited a linewidth of 1 nm at the peak wavelength of around 405 nm, corresponding to a quality factor of 405. High data transmission in free space with an opening in the eye diagram was exhibited at 150 Mbps, which is limited by the detection system. These results showed that GaN-based RCLEDs grown on Si are promising as a low-cost emitter for visible light communications in future.https://www.mdpi.com/2079-4991/12/1/134GaN-on-Siresonant-cavity light-emitting diodechemical-mechanical polishingvisible light communications
spellingShingle Wen Chen
Meixin Feng
Yongjun Tang
Jian Wang
Jianxun Liu
Qian Sun
Xumin Gao
Yongjin Wang
Hui Yang
GaN-Based Resonant-Cavity Light-Emitting Diodes Grown on Si
Nanomaterials
GaN-on-Si
resonant-cavity light-emitting diode
chemical-mechanical polishing
visible light communications
title GaN-Based Resonant-Cavity Light-Emitting Diodes Grown on Si
title_full GaN-Based Resonant-Cavity Light-Emitting Diodes Grown on Si
title_fullStr GaN-Based Resonant-Cavity Light-Emitting Diodes Grown on Si
title_full_unstemmed GaN-Based Resonant-Cavity Light-Emitting Diodes Grown on Si
title_short GaN-Based Resonant-Cavity Light-Emitting Diodes Grown on Si
title_sort gan based resonant cavity light emitting diodes grown on si
topic GaN-on-Si
resonant-cavity light-emitting diode
chemical-mechanical polishing
visible light communications
url https://www.mdpi.com/2079-4991/12/1/134
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AT jianwang ganbasedresonantcavitylightemittingdiodesgrownonsi
AT jianxunliu ganbasedresonantcavitylightemittingdiodesgrownonsi
AT qiansun ganbasedresonantcavitylightemittingdiodesgrownonsi
AT xumingao ganbasedresonantcavitylightemittingdiodesgrownonsi
AT yongjinwang ganbasedresonantcavitylightemittingdiodesgrownonsi
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