Influence of Damping on the Dynamical Behavior of the Electrostatic Parallel-plate and Torsional Actuators with Intermolecular Forces
The influence of damping on the dynamical behavior of the electrostaticparallel-plate and torsional actuators with the van der Waals (vdW) or Casimir force(torque) is presented. The values of the pull-in parameters and the number of theequilibrium points do not change whether there is damping or not...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2007-11-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/7/12/3012/ |