MICROHEATERS FOR COPPER OXIDE-BASED GAS SENSORS
This paper describes two procedures developed for obtaining microheaters for copper oxide-based gas sensors. Different types of substrates (glass, SiO2/Si and ceramic) are investigated, as well as different configurations of geometric parameters for meandering heating elements. It is shown that micr...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Technical University of Moldova
2020-03-01
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| Series: | Journal of Engineering Science (Chişinău) |
| Subjects: | |
| Online Access: | https://jes.utm.md/wp-content/uploads/sites/20/2020/05/JES-2020-2-pp_52-61.pdf |