MICROHEATERS FOR COPPER OXIDE-BASED GAS SENSORS
This paper describes two procedures developed for obtaining microheaters for copper oxide-based gas sensors. Different types of substrates (glass, SiO2/Si and ceramic) are investigated, as well as different configurations of geometric parameters for meandering heating elements. It is shown that micr...
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| Format: | Article |
| Language: | English |
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Technical University of Moldova
2020-03-01
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| Series: | Journal of Engineering Science (Chişinău) |
| Subjects: | |
| Online Access: | https://jes.utm.md/wp-content/uploads/sites/20/2020/05/JES-2020-2-pp_52-61.pdf |
| _version_ | 1818823844212768768 |
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| author | Ababii, Nicolai Trofim, Viorel Lupan, Oleg |
| author_facet | Ababii, Nicolai Trofim, Viorel Lupan, Oleg |
| author_sort | Ababii, Nicolai |
| collection | DOAJ |
| description | This paper describes two procedures developed for obtaining microheaters for copper oxide-based gas sensors. Different types of substrates (glass, SiO2/Si and ceramic) are investigated, as well as different configurations of geometric parameters for meandering heating elements. It is shown that microheaters made on glass, ceramic and SiO2/Si substrates can survive up to a temperature of ~400 °C, which allows their integration for applications in gas sensing devices to maintain necessary operating temperature. |
| first_indexed | 2024-12-18T23:46:26Z |
| format | Article |
| id | doaj.art-50ace8d972fc4da4aaa58c225ca66b0a |
| institution | Directory Open Access Journal |
| issn | 2587-3474 2587-3482 |
| language | English |
| last_indexed | 2024-12-18T23:46:26Z |
| publishDate | 2020-03-01 |
| publisher | Technical University of Moldova |
| record_format | Article |
| series | Journal of Engineering Science (Chişinău) |
| spelling | doaj.art-50ace8d972fc4da4aaa58c225ca66b0a2022-12-21T20:47:11ZengTechnical University of MoldovaJournal of Engineering Science (Chişinău)2587-34742587-34822020-03-01XXVII2526110.5281/zenodo.3784343MICROHEATERS FOR COPPER OXIDE-BASED GAS SENSORSAbabii, Nicolai0https://orcid.org/0000-0001-5046-8611Trofim, Viorel1https://orcid.org/0000-0002-6620-3076Lupan, Oleg2https://orcid.org/0000-0002-7913-9712Technical University of Moldova, 168 Stefan cel Mare bvd., MD-2004 Chisinau, Republic of MoldovaTechnical University of Moldova, 168 Stefan cel Mare bvd., MD-2004 Chisinau, Republic of MoldovaTechnical University of Moldova, 168 Stefan cel Mare bvd., MD-2004 Chisinau, Republic of MoldovaThis paper describes two procedures developed for obtaining microheaters for copper oxide-based gas sensors. Different types of substrates (glass, SiO2/Si and ceramic) are investigated, as well as different configurations of geometric parameters for meandering heating elements. It is shown that microheaters made on glass, ceramic and SiO2/Si substrates can survive up to a temperature of ~400 °C, which allows their integration for applications in gas sensing devices to maintain necessary operating temperature.https://jes.utm.md/wp-content/uploads/sites/20/2020/05/JES-2020-2-pp_52-61.pdfmicroheatercopper oxidegas sensorsglass substratesemiconductors |
| spellingShingle | Ababii, Nicolai Trofim, Viorel Lupan, Oleg MICROHEATERS FOR COPPER OXIDE-BASED GAS SENSORS Journal of Engineering Science (Chişinău) microheater copper oxide gas sensors glass substrate semiconductors |
| title | MICROHEATERS FOR COPPER OXIDE-BASED GAS SENSORS |
| title_full | MICROHEATERS FOR COPPER OXIDE-BASED GAS SENSORS |
| title_fullStr | MICROHEATERS FOR COPPER OXIDE-BASED GAS SENSORS |
| title_full_unstemmed | MICROHEATERS FOR COPPER OXIDE-BASED GAS SENSORS |
| title_short | MICROHEATERS FOR COPPER OXIDE-BASED GAS SENSORS |
| title_sort | microheaters for copper oxide based gas sensors |
| topic | microheater copper oxide gas sensors glass substrate semiconductors |
| url | https://jes.utm.md/wp-content/uploads/sites/20/2020/05/JES-2020-2-pp_52-61.pdf |
| work_keys_str_mv | AT ababiinicolai microheatersforcopperoxidebasedgassensors AT trofimviorel microheatersforcopperoxidebasedgassensors AT lupanoleg microheatersforcopperoxidebasedgassensors |