Visualizing local bending of lattice planes by extending two-azimuth synchrotron X-ray diffraction datasets to asymmetric reflection

Visualizing local bending of lattice planes by extending two-azimuth synchrotron X-ray diffraction datasets to asymmetric reflection

Synchrotron X-ray rocking curve imaging (RCI) is modified to visualize local bending of lattice planes of a single crystal substrate (XR-V-LBLP). This method uses two-azimuth RCI datasets of asymmetric reflection or symmetric reflection. The analysis algorithm is described and a Python software code...

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Bibliographic Details
Main Authors: Osami Sakata, Shinjiro Yagyu
Format: Article
Language:English
Published: Taylor & Francis Group 2023-12-01
Series:Science and Technology of Advanced Materials: Methods
Subjects:
synchrotron x-ray characterization method
x-ray diffraction topography
rocking curve imaging
local lattice-plane bending
asymmetric reflection
crystal perfection
wafer
Online Access:http://dx.doi.org/10.1080/27660400.2023.2199130

Internet

http://dx.doi.org/10.1080/27660400.2023.2199130

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