Miniaturized Wide-Range Field-Emission Vacuum Gauge

Miniaturized Wide-Range Field-Emission Vacuum Gauge

Miniaturized vacuum gauges (MVGs) for the measurement range 5.7x10-7 to 1.1x10-2 mbar were fabricated in a selfaligned approach using focused ion beam (FIB) nanomachining and reactive ion etching (RIE). The MVG consists of two properly insulated electrodes integrated on top of an atomic force micros...

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Bibliographic Details
Main Authors: Amra Avdić, Anna Maria Lausch, Emmerich Bertagnolli, Alois Lugstein
Format: Article
Language:English
Published: Hindawi - SAGE Publishing 2014-11-01
Series:Nanomaterials and Nanotechnology
Subjects:
Nanoscale vacuum gauge
field emission
Online Access:http://www.intechopen.com/journals/nanomaterials_and_nanotechnology/miniaturized-wide-range-field-emission-vacuum-gauge

Internet

http://www.intechopen.com/journals/nanomaterials_and_nanotechnology/miniaturized-wide-range-field-emission-vacuum-gauge

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