Strain mapping and simulation of transistor structures in a 22nm FDSOI technology

Bibliographic Details
Main Authors:	Utess Dirk, Kleimaier Dominik Martin, Billan Etienne, Youssuf Tashfain, Zhao Zhixing, Nemec Thorgund, Meyer Moritz Andreas, Rinderknecht Jochen
Format:	Article
Language:	English
Published:	EDP Sciences 2024-01-01
Series:	BIO Web of Conferences
Subjects:	strain fdsoi transistor simulation ped
Online Access:	https://www.bio-conferences.org/articles/bioconf/pdf/2024/48/bioconf_emc2024_24030.pdf

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