Application of the method of self-extending high-temperature synthesis for receiving porous vacuum inserts of faceplates of electronic mechanical engineering equipment

There are given the results of research the process of receiving by method of self-extending high-temperature synthesis of porous vacuum inserts of the faceplates used by production of semiconductor silicon plates at the enterprises of electronic mechanical engineering.

Bibliographic Details
Main Authors: M. V. Tumilovich, L. P. Pilinivich, A. M. Taraykovich, V. E. Tolstik, G. A. Sheko
Format: Article
Language:Russian
Published: Educational institution «Belarusian State University of Informatics and Radioelectronics» 2019-06-01
Series:Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki
Subjects:
Online Access:https://doklady.bsuir.by/jour/article/view/1072