Application of the method of self-extending high-temperature synthesis for receiving porous vacuum inserts of faceplates of electronic mechanical engineering equipment
There are given the results of research the process of receiving by method of self-extending high-temperature synthesis of porous vacuum inserts of the faceplates used by production of semiconductor silicon plates at the enterprises of electronic mechanical engineering.
Main Authors: | M. V. Tumilovich, L. P. Pilinivich, A. M. Taraykovich, V. E. Tolstik, G. A. Sheko |
---|---|
Format: | Article |
Language: | Russian |
Published: |
Educational institution «Belarusian State University of Informatics and Radioelectronics»
2019-06-01
|
Series: | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
Subjects: | |
Online Access: | https://doklady.bsuir.by/jour/article/view/1072 |
Similar Items
-
Si Nanocrystals Embedded in a Silicon Oxynitride Matrix
by: Abdelillah Slaoui, et al.
Published: (2011-10-01) -
Gate dielectric nitrization and effect on changes in the density of interlayer states of MOS structures
by: N.V. Cherkesova, et al.
Published: (2023-12-01) -
Charge Transport Mechanism in the Forming-Free Memristor Based on PECVD Silicon Oxynitride
by: Andrei A. Gismatulin, et al.
Published: (2023-01-01) -
Investigation of the RF Sputtering Process and the Properties of Deposited Silicon Oxynitride Layers under Varying Reactive Gas Conditions
by: Nikolett Hegedüs, et al.
Published: (2022-09-01) -
Powder metallurgy equipment manual /
by: 5536 Powder Metallurgy Equipment Association
Published: (c197)