Silicon flower structures by maskless plasma etching

Silicon flower structures by maskless plasma etching

Silicon nano/microstructures are widely utilized in the semiconductor industry, and plasma etching is the most prominent method for fabricating silicon nano/microstructures. Among the variety of silicon nano/microstructures, black silicon with light-trapping properties has garnered broad interest fr...

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Bibliographic Details
Main Authors: Geng Zhao, Xiaoyan Zhao, Haimiao Zhang, Ziwei Lian, Yongmin Zhao, Anjie Ming, Yuanwei Lin
Format: Article
Language:English
Published: Elsevier 2023-12-01
Series:Heliyon
Subjects:
Silicon flower microstructures
Black silicon
Maskless plasma etching
Fluorocarbon gas
Infra-Red absorption
Online Access:http://www.sciencedirect.com/science/article/pii/S2405844023100004

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http://www.sciencedirect.com/science/article/pii/S2405844023100004

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