MEMS-Based Tactile Sensors: Materials, Processes and Applications in Robotics

Commonly encountered problems in the manipulation of objects with robotic hands are the contact force control and the setting of approaching motion. Microelectromechanical systems (MEMS) sensors on robots offer several solutions to these problems along with new capabilities. In this review, we analy...

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Bibliographic Details
Main Author: Ilker S. Bayer
Format: Article
Language:English
Published: MDPI AG 2022-11-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/13/12/2051