Coupled D33 Mode-Based High Performing Bio-Inspired Piezoelectric MEMS Directional Microphone

Microelectromechanical system (MEMS) directional microphones have been identified as having use in multi-projected virtual reality applications such as virtual meetings for projecting cameras. In these applications, the acoustic sensitivity plays a vital role as it biases the directional sensing, si...

Full description

Bibliographic Details
Main Authors: Ashiqur Rahaman, Haeil Jung, Byungki Kim
Format: Article
Language:English
Published: MDPI AG 2021-02-01
Series:Applied Sciences
Subjects:
Online Access:https://www.mdpi.com/2076-3417/11/3/1305