Coupled D33 Mode-Based High Performing Bio-Inspired Piezoelectric MEMS Directional Microphone
Microelectromechanical system (MEMS) directional microphones have been identified as having use in multi-projected virtual reality applications such as virtual meetings for projecting cameras. In these applications, the acoustic sensitivity plays a vital role as it biases the directional sensing, si...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2021-02-01
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Series: | Applied Sciences |
Subjects: | |
Online Access: | https://www.mdpi.com/2076-3417/11/3/1305 |