Coupled D33 Mode-Based High Performing Bio-Inspired Piezoelectric MEMS Directional Microphone
Microelectromechanical system (MEMS) directional microphones have been identified as having use in multi-projected virtual reality applications such as virtual meetings for projecting cameras. In these applications, the acoustic sensitivity plays a vital role as it biases the directional sensing, si...
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| Format: | Article |
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MDPI AG
2021-02-01
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| Series: | Applied Sciences |
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| Online Access: | https://www.mdpi.com/2076-3417/11/3/1305 |
| _version_ | 1797417146649673728 |
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| author | Ashiqur Rahaman Haeil Jung Byungki Kim |
| author_facet | Ashiqur Rahaman Haeil Jung Byungki Kim |
| author_sort | Ashiqur Rahaman |
| collection | DOAJ |
| description | Microelectromechanical system (MEMS) directional microphones have been identified as having use in multi-projected virtual reality applications such as virtual meetings for projecting cameras. In these applications, the acoustic sensitivity plays a vital role as it biases the directional sensing, signal-to-noise ratio (SNR) and self-noise. The acoustic sensitivity is the multiplied outcome of the mechanical sensitivity and the electrical sensitivity. As the dimensions are limited in MEMS technology, the improvement of the acoustic sensitivity by reflecting the mechanical as well as electrical domains is a challenge. This paper reports on a new formation of the D33 mode, the coupled D33 mode, based on piezoelectric sensing to improve the acoustic functionalities. The unique advancement of the proposed D33 mode is that it allows multiple spans of the regular D33 mode to perform together, despite this increasing the diaphragm’s dimensions. At a reduced diaphragm size, the orientation of the coupled D33 mode realizes the maximum conversion of the mechanical deflection into electrical sensitivity. The significance of the proposed D33 mode in comparison to the regular D33 mode is simulated using COMSOL Multiphysics. Then, for a proof–of–concept, the experimental validation is carried out using a piezoelectric MEMS directional microphone inspired by the ears of the fly <i>Ormia ochracea</i>. In both ways, the results are found to be substantially improved in comparison with the regular approach of the D33 mode, showing the novelty of this work. |
| first_indexed | 2024-03-09T06:14:37Z |
| format | Article |
| id | doaj.art-52101093ed95409ca5f45005a0e8d67f |
| institution | Directory Open Access Journal |
| issn | 2076-3417 |
| language | English |
| last_indexed | 2024-03-09T06:14:37Z |
| publishDate | 2021-02-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Applied Sciences |
| spelling | doaj.art-52101093ed95409ca5f45005a0e8d67f2023-12-03T11:54:50ZengMDPI AGApplied Sciences2076-34172021-02-01113130510.3390/app11031305Coupled D33 Mode-Based High Performing Bio-Inspired Piezoelectric MEMS Directional MicrophoneAshiqur Rahaman0Haeil Jung1Byungki Kim2School of Mechatronics Engineering, Korea University of Technology and Education, Cheonan, Chungnam 31253, KoreaSchool of Mechanical Engineering, Korea University of Technology and Education, Cheonan, Chungnam 31253, KoreaSchool of Mechatronics Engineering, Korea University of Technology and Education, Cheonan, Chungnam 31253, KoreaMicroelectromechanical system (MEMS) directional microphones have been identified as having use in multi-projected virtual reality applications such as virtual meetings for projecting cameras. In these applications, the acoustic sensitivity plays a vital role as it biases the directional sensing, signal-to-noise ratio (SNR) and self-noise. The acoustic sensitivity is the multiplied outcome of the mechanical sensitivity and the electrical sensitivity. As the dimensions are limited in MEMS technology, the improvement of the acoustic sensitivity by reflecting the mechanical as well as electrical domains is a challenge. This paper reports on a new formation of the D33 mode, the coupled D33 mode, based on piezoelectric sensing to improve the acoustic functionalities. The unique advancement of the proposed D33 mode is that it allows multiple spans of the regular D33 mode to perform together, despite this increasing the diaphragm’s dimensions. At a reduced diaphragm size, the orientation of the coupled D33 mode realizes the maximum conversion of the mechanical deflection into electrical sensitivity. The significance of the proposed D33 mode in comparison to the regular D33 mode is simulated using COMSOL Multiphysics. Then, for a proof–of–concept, the experimental validation is carried out using a piezoelectric MEMS directional microphone inspired by the ears of the fly <i>Ormia ochracea</i>. In both ways, the results are found to be substantially improved in comparison with the regular approach of the D33 mode, showing the novelty of this work.https://www.mdpi.com/2076-3417/11/3/1305virtual realitycoupled D33 modefly <i>Ormia ochracea</i>MEMShigh performancedirectional microphone |
| spellingShingle | Ashiqur Rahaman Haeil Jung Byungki Kim Coupled D33 Mode-Based High Performing Bio-Inspired Piezoelectric MEMS Directional Microphone Applied Sciences virtual reality coupled D33 mode fly <i>Ormia ochracea</i> MEMS high performance directional microphone |
| title | Coupled D33 Mode-Based High Performing Bio-Inspired Piezoelectric MEMS Directional Microphone |
| title_full | Coupled D33 Mode-Based High Performing Bio-Inspired Piezoelectric MEMS Directional Microphone |
| title_fullStr | Coupled D33 Mode-Based High Performing Bio-Inspired Piezoelectric MEMS Directional Microphone |
| title_full_unstemmed | Coupled D33 Mode-Based High Performing Bio-Inspired Piezoelectric MEMS Directional Microphone |
| title_short | Coupled D33 Mode-Based High Performing Bio-Inspired Piezoelectric MEMS Directional Microphone |
| title_sort | coupled d33 mode based high performing bio inspired piezoelectric mems directional microphone |
| topic | virtual reality coupled D33 mode fly <i>Ormia ochracea</i> MEMS high performance directional microphone |
| url | https://www.mdpi.com/2076-3417/11/3/1305 |
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