Effects of humidity and temperature on quality factor of micro-beam resonators in atmospheric pressure and gas rarefaction
At atmospheric pressure (p=101325 Pa), the effects of humidity and temperature on moist air become important when discussing the quality factor of micro-cantilever and micro-bridge resonators. The squeeze film damping (SFD) problem, the dominant damping source for micro-beam resonators, is modelled...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Vietnam Ministry of Science and Technology
2024-03-01
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| Series: | Vietnam Journal of Science, Technology and Engineering |
| Subjects: | |
| Online Access: | https://vietnamscience.vjst.vn/index.php/vjste/article/view/1179 |