Hybrid Junction Termination Consisting of a Variation Lateral Doping Structure and a Spiral Polysilicon Resistive Field Plate
A hybrid junction termination structure consisting of a variation lateral doping (VLD) region and a spiral polysilicon resistive field plate (PRFP) is proposed in this brief. Surface electric fields of the VLD region are modulated by the PRFP and distribute more uniformly. Compared with the conventi...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2022-01-01
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| Series: | IEEE Journal of the Electron Devices Society |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9749127/ |