Modeling of a breakdown voltage in microdischarges
Non-equilibrium plasmas have been used as one of the principal technologies for development of microelectronics and they are the basis for the development of new generations of nano-electronics devices required for 65 and 40 nm technologies. Microdischarges recently have become more common in everyd...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Association of Chemical Engineers of Serbia
2009-01-01
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| Series: | Hemijska Industrija |
| Subjects: | |
| Online Access: | http://www.doiserbia.nb.rs/img/doi/0367-598X/2009/0367-598X0904293D.pdf |