Overview of the technologies used in the fabrication of MEMS/NEMS actuators for space applications
Given the advantages in terms of weight, size and cost and because it can withstand severe shocks and temperature changes, the MEMS/NEMS sensors are widely used in the aerospace domain. This paper presents a brief history of the scientists who made reference to micro and nano technologies for the fi...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
National Institute for Aerospace Research “Elie Carafoli” - INCAS
2023-09-01
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| Series: | INCAS Bulletin |
| Subjects: | |
| Online Access: | https://bulletin.incas.ro/files/mustata_vidan_larco_boglis_antofie__vol_15_iss_3.pdf |