Overview of the technologies used in the fabrication of MEMS/NEMS actuators for space applications
Given the advantages in terms of weight, size and cost and because it can withstand severe shocks and temperature changes, the MEMS/NEMS sensors are widely used in the aerospace domain. This paper presents a brief history of the scientists who made reference to micro and nano technologies for the fi...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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National Institute for Aerospace Research “Elie Carafoli” - INCAS
2023-09-01
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| Series: | INCAS Bulletin |
| Subjects: | |
| Online Access: | https://bulletin.incas.ro/files/mustata_vidan_larco_boglis_antofie__vol_15_iss_3.pdf |
| _version_ | 1797693066525540352 |
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| author | Stefan-Mircea MUSTATA Cristian VIDAN Ciprian-Marius LARCO Carmen-Ioana BOGLIS Bianca-Gabriela ANTOFIE |
| author_facet | Stefan-Mircea MUSTATA Cristian VIDAN Ciprian-Marius LARCO Carmen-Ioana BOGLIS Bianca-Gabriela ANTOFIE |
| author_sort | Stefan-Mircea MUSTATA |
| collection | DOAJ |
| description | Given the advantages in terms of weight, size and cost and because it can withstand severe shocks and temperature changes, the MEMS/NEMS sensors are widely used in the aerospace domain. This paper presents a brief history of the scientists who made reference to micro and nano technologies for the first time, followed by a synthesis of the leading technologies used in the manufacture of
microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) intensively used in aerospace industry. After reviewing the latest technologies used in the manufacture of MEMS/NEMS sensors, the paper continues with predicting the current state regarding the development of NEMS and MEMS, respectively. |
| first_indexed | 2024-03-12T02:37:12Z |
| format | Article |
| id | doaj.art-52b68491947f477ab8f02fa11ca7bf44 |
| institution | Directory Open Access Journal |
| issn | 2066-8201 2247-4528 |
| language | English |
| last_indexed | 2024-03-12T02:37:12Z |
| publishDate | 2023-09-01 |
| publisher | National Institute for Aerospace Research “Elie Carafoli” - INCAS |
| record_format | Article |
| series | INCAS Bulletin |
| spelling | doaj.art-52b68491947f477ab8f02fa11ca7bf442023-09-04T12:44:06ZengNational Institute for Aerospace Research “Elie Carafoli” - INCASINCAS Bulletin2066-82012247-45282023-09-01153577110.13111/2066-8201.2023.15.3.5Overview of the technologies used in the fabrication of MEMS/NEMS actuators for space applicationsStefan-Mircea MUSTATA0Cristian VIDAN1Ciprian-Marius LARCO2Carmen-Ioana BOGLIS3Bianca-Gabriela ANTOFIE4Military Technical Academy “Ferdinand I”, 39-49 George Cosbuc Blvd., Sector 5, Bucharest 050142, Romania, stmustata@yahoo.com Military Technical Academy “Ferdinand I”, 39-49 George Cosbuc Blvd., Sector 5, Bucharest 050142, Romania and University Politehnica of Bucharest, Faculty of Aerospace Engineering, 1-7 Polizu Street, Sector 1, Bucharest 011061, România, vidan.cristian@yahoo.comMilitary Technical Academy “Ferdinand I”, 39-49 George Cosbuc Blvd., Sector 5, Bucharest 050142, Romania, ciprian_larco@yahoo.comniversity Politehnica of Bucharest, Faculty of Aerospace Engineering, 1-7 Polizu Street, Sector 1, Bucharest 011061, România, bogliscarmen@gmail.com Military Technical Academy “Ferdinand I”, 39-49 George Cosbuc Blvd., Sector 5, Bucharest 050142, Romania, antofiebianca@gmail.comGiven the advantages in terms of weight, size and cost and because it can withstand severe shocks and temperature changes, the MEMS/NEMS sensors are widely used in the aerospace domain. This paper presents a brief history of the scientists who made reference to micro and nano technologies for the first time, followed by a synthesis of the leading technologies used in the manufacture of microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) intensively used in aerospace industry. After reviewing the latest technologies used in the manufacture of MEMS/NEMS sensors, the paper continues with predicting the current state regarding the development of NEMS and MEMS, respectively.https://bulletin.incas.ro/files/mustata_vidan_larco_boglis_antofie__vol_15_iss_3.pdfnanoparticlesmicrotechnologymultilayer structuresmicroelectronic systemsnanoelectromechanical systemsgyroscopes |
| spellingShingle | Stefan-Mircea MUSTATA Cristian VIDAN Ciprian-Marius LARCO Carmen-Ioana BOGLIS Bianca-Gabriela ANTOFIE Overview of the technologies used in the fabrication of MEMS/NEMS actuators for space applications INCAS Bulletin nanoparticles microtechnology multilayer structures microelectronic systems nanoelectromechanical systems gyroscopes |
| title | Overview of the technologies used in the fabrication of MEMS/NEMS actuators for space applications |
| title_full | Overview of the technologies used in the fabrication of MEMS/NEMS actuators for space applications |
| title_fullStr | Overview of the technologies used in the fabrication of MEMS/NEMS actuators for space applications |
| title_full_unstemmed | Overview of the technologies used in the fabrication of MEMS/NEMS actuators for space applications |
| title_short | Overview of the technologies used in the fabrication of MEMS/NEMS actuators for space applications |
| title_sort | overview of the technologies used in the fabrication of mems nems actuators for space applications |
| topic | nanoparticles microtechnology multilayer structures microelectronic systems nanoelectromechanical systems gyroscopes |
| url | https://bulletin.incas.ro/files/mustata_vidan_larco_boglis_antofie__vol_15_iss_3.pdf |
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